Main Features:
1. using developed type of high vacuum system, quicker pumping down speed, higher efficiency, saving power, low noise and long service time.
2. The vacuum system is equipped with components such as high vacuum value, high vacuum oil diffusion pump, Roots vacuum pump, and mechanical vacuum pump with rotary blades.
3. The power supply for metallization includes DC cylindrical target power supply, DC high voltage bombardment power supply, and medium frequency power supply.
4. The cooling system is equipped with an automatic hydraulic pressure deficiency alarm device according to the design requirement.
5. The electrical control system is designed to have multiple protecting devices (for hydraulic pressure, power failure and incorrect operation) to control the entire production process automatically (with touch screen and PLC).
Equipment Configuration
1. The vacuum chamber is made of high quality stainless steel (SUS304), a vertical type, single door structure.
2. The vacuum system is equipped with components such as high vacuum value, high vacuum oil diffusion pump, Roots vacuum pump, and mechanical vacuum pump, and one water vapor cryopump.
3. The power supply for metallization includes DC cylindrical target power supply, DC high voltage bombardment power supply, and medium frequency power supply.
4. The cooling system is equipped with an automatic hydraulic pressure deficiency alarm device according to the design requirement.
5. The electrical control system is designed to have multiple protecting devices (for hydraulic pressure, power failure and incorrect operation) to control the entire production process automatically (with touch screen and PLC).
Technical Parameters:
|
Item
|
ZJL-1000
|
ZJL-1200
|
ZJL-1400
|
ZJL-1600
|
|
Pumping time (new, idling)
|
2×10-2Pa＜8min
|
2×10-2Pa＜10min
|
|
Ultimate vacuum(new, idling)
|
≤8×10-4Pa
|
|
Work piece rotating speed
|
0～20r/min
|
|
Weight(Kg)
|
4000KG
|
5000KG
|
6300KG
|
7120KG
|
|
Dimension (m)
|
3.2 X 5 X 2.6M
|
4.2 X 5 X 2.6M
|
4.6 X 6 X 3.2M
|
5 X 7 X 3.3M
|
|
