Main Features:
The structure simple reasonable, the production efficiency is high, the area is small, simplicity of operator.
Main Configuration:
1. Uses the vertical box structure, the chamber is made by the carbon steel;
2. The vacuum system uses the diffusion pump, Roots pump, the mechanical pump ;
3. Uses a set of evaporation system or moving plane target magnetron sputtering system;
4. Touch screen completely automatic control system;
Specification, Technical Parameter:
|
Model
|
Chamber Size
|
Ultimate Vacuum
|
Pumping Time
(idling, dry, from atmosphere pulls out to 5X10-2Pa)
|
|
ZL-600
|
600X600X1500
|
≤10-4Pa
|
≤10min
|
|
ZL-800
|
800X800X1500
|
≤10-4Pa
|
|
ZL-1000
|
1250X1050X1850
|
≤10-4Pa
|
|
ZL-2000
|
2250X1050X1850
|
≤10-4Pa
|
|
ZL-2400
|
2550X1050X1850
|
≤10-4Pa
|
|
ZL-1800
|
1800X2150
|
≤10-4Pa
|
|
