Main Features:
1. The vacuum chamber is a vertical type single door structure made of stainless steel. Chamber sizeΦ1400~2500mm
2. The vacuum system is composed of mechanical pump, roots pump, and diffusion pump.
3. Coating system for 10~28 arc or 1~4 arc column or plane arc.
4. High power pulse bias power source.
5. Inflating system has 1~4 sets mass flow control instrument and a gas flow display.
6. The electrical control system is equipped with sound and light alarm devices for circuit overload, water cutoff and air cutoff.
7. The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.
Technical Parameters:
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Gross weight
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4000kg～8000kg
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Total power
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100KW～180KW
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Suction rate (idling)
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8×10-3Pa≤20min
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Ultimate vacuum (idling)
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≤8×10-4Pa
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Gas leak rate (idling)
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0.67Pa/Hr
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Work piece rotating speed
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≥0～5r/min
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Baking temperature
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room temperature～350℃
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