Main Features:
1. The vacuum chamber is a vertical type single door structure made of stainless steel.
2. The vacuum system is composed of a mechanical pump, a Roots pump, and 2-4 homemade high quality molecular pumps or diffusion pump.
3. The metallization system has 3 sets of 20KW medium frequency power supply, being equipped with 3 pairs of targets and a heating arc device, being able to treat the working surface effectively.
4. The target washing device has 3 target washing carriages pneumatically controlled respectively.
5. The vacuum inflating system has a mass flow control instrument and a gas flow display.
6. The electrical control system is equipped with sound and light alarm devices for circuit overload, water cutoff and air cutoff.
7. The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.
Technical Parameters:
|
Gross weight
|
2500kg～3500kg
|
|
Total power
|
120KW～150KW
|
|
Suction rate (idling)
|
8×10-3Pa≤15min
|
|
Ultimate vacuum (idling)
|
≤8×10-4Pa
|
|
Gas leak rate (idling)
|
0.67Pa/Hr
|
|
Work piece rotating speed
|
≥0～5r/min
|
|
Baking temperature
|
350℃
|
|
