Main Features:
1. Uses the response gas plasma source auxiliary deposition, carries on the pre-clean and coating's auxiliary deposition to the work piece;
2. Uses the high efficiency the pulse bias power source, causes the work piece and the film obtains a better binding force;
3. Uses the multi-wrap twin target and the arc, may simultaneously install 2-4 kind of different fine metal or the alloy target materials, obtains compound nanometer coating;
4. The work rest uses male, the rotation structure, good bearing power and thermostable, and is transportable the housing, facilitates the loading and unloading quite heavy mold.
5. Touch-screen +PLC, may realize the completely automatic control, automatic/manual momentarily cuts;
Main Configuration:
1. Vacuum chamber is vertical one open door , 304 stainless steel manufactures, vacuum chamber internal diameter from φ1000mm-Φ1300mm;
2. Vacuum system by Rotary vane pump, Roots pump and Oil Diffusion Pumps or Molecular Pump Constitution;
3. Coating system uses 1-2 intermediate frequency magnetism to control the sputtering power source, has 1-2 pair of non-balanced magnetism to control the target, and has 6-14 hot cathode electric arcs;
4. High efficiency pulse bias power source;
5. The gasification system uses domestically produced or the import gaseous mass flowmeter, the gas flow amount control (demonstration) meter;
6. The electrically controlled system establishment electric circuit overloaded, cuts off the water supply, dies the acousto-optics alarm device;
7. Control system (touch-screen +PLC), real time display detailed parameter, completely automatic control entire production process, and automatic memory technological parameter
Technical Parameters:
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Gross weight
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4000kg～6000kg
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Total power
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120KW～180KW
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Suction rate (idling)
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8×10-3Pa≤20min
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Ultimate vacuum (idling)
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≤8×10-4Pa
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Gas leak rate (idling)
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0.67Pa/Hr
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Work piece rotating speed
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≥0～5r/min
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Baking temperature
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room temperature～350℃
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