Main Features:

1. This machine has a fast depositing rate and little temperature rise, being able to well restrain sparking and target intoxication.

2. The high energy released during sputtering significantly enhances film density and adhesion.

3. Equipped with a touch screen, this machine can be controlled fully automatically or manually, which can

be toggled at any time.

4. The vacuum chamber has a huge volume and high load capacity, which results in high production efficiency.

5. The work piece rack is a revolution structure, which can be set for automatic rotation clockwise or counterclockwise, producing fairly even film.

6. The entire machine has a rational configuration, low air suction rate, low noise, and low energy consumption.

Main Configuration:

1.   The chamber, valves and pipeline of this vacuum coating machine are all made of stainless steel, Chamber size Φ1000~1800mm;   

2.   Vacuum system consist of high vacuum valve, high vacuum diffusion pump or molecular pump, roots pump, rotary piston pump, slide vane rotary vacuum pump;

3.    Coating system use 2～8 sets plane-target or Column-target and 2～8sets power source;

4.   Use one fast cycle water vapor cryopump;

5.   Inflating system has 1～4 sets mass flow control instrument and a gas flow display;

6.    Cooling system: there is a water pressure alarm device on this machine;

7.    The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.

Technical Parameters: